JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

期刊详情

期刊ISSN：	1057-7157
E-ISSN：	1941-0158
影响因子：	2.5
自引率：	8%
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出版语言：	英文
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出版信息
出版商	Institute of Electrical and Electronics Engineers Inc.
期刊官网	http://eds.ieee.org/journal-of-microelectromechanical-systems.html
涉及的研究方向	工程技术-工程：电子与电气
年文章数	0
是否OA	否
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SCI期刊收录coverage

期刊简介
The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.

期刊简介

The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.